Product Type

Boat product inspection

Inspection Items

Component position, die edge chipping, die scratch, die contamination, die crack, die position metrology, die rotation metrology, crack, chipping

Precision

Shift inspection capability: Repeatability 0.5μm / Accuracy 0.8μm

SOH inspection capability: Repeatability 0.5μm / Accuracy 1μm

Die chipping: ≥5μm x 5μm

Die crack: ≥5μm x 5μm

Compatibility

Compatible vehicle size: 200mm - 350mm (L) * 100mm - 180mm